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短波长光栅面发射量子级联激光器结构及制备方法

Abstract

一种短波长光栅面发射量子级联激光器结构,包括:一衬底;一下波导层生长在该衬底上;一有源层生长在该下波导层上;一上波导层生长在该有源层上;一盖层生长在该上波导层上,该盖层的上半部位置形成二级分布反馈光栅;一光栅层位于盖层的上面,并且该光栅层具有与盖层上的光栅相同的光栅周期,在该光栅层上形成有多个窗口,所述窗口的深度到达盖层的表面;其中所述的下波导层、有源层、上波导层、盖层和光栅层的两侧为梯形斜面;一二氧化硅层生长在衬底的上面和梯形斜面上,及所述光栅层上面两侧的边缘部分;一正面金属电极层生长在二氧化硅层的上面及光栅层表面未被二氧化硅层覆盖的两侧的边缘部分;一背面金属电极层生长在衬底的下面,形成短波长光栅面发射量子级联激光器结构

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Last time updated on 29/11/2016

This paper was published in Knowledge Repository of SEMI,CAS.

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