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A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism
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Shang, Jiangkun, Tian, Yanling, Li, Zheng, Wang, Fujun and Cai, Kunhai (2015) A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism. Review of Scientific Instruments, 86 (9). 095001. doi:10.1063/1.4929867 ISSN 0034-6748.
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WRAP_1371255-es-290116-j._shang_a_novel_voice_coil_motor-driven_compliant.pdf - Accepted Version - Requires a PDF viewer. Download (1106Kb) | Preview |
Official URL: http://dx.doi.org/10.1063/1.4929867
Abstract
This paper presents a 2-degrees of freedom flexure-based micropositioning stage with a flexible decoupling mechanism. The stage is composed of an upper planar stage and four vertical support links to improve the out-of-plane stiffness. The moving platform is driven by two voice coil motors, and thus it has the capability of large working stroke. The upper stage is connected with the base through six double parallel four-bar linkages mechanisms, which are orthogonally arranged to implement the motion decoupling in the x and y directions. The vertical support links with serially connected hook joints are utilized to guarantee good planar motion with heavy-loads. The static stiffness and the dynamic resonant frequencies are obtained based on the theoretical analyses. Finite element analysis is used to investigate the characteristics of the developed stage. Experiments are carried out to validate the established models and the performance of the developed stage. It is noted that the developed stage has the capability of translational motion stroke of 1.8 mm and 1.78 mm in working axes. The maximum coupling errors in the x and y directions are 0.65% and 0.82%, respectively, and the motion resolution is less than 200 nm. The experimental results show that the developed stage has good capability for trajectory tracking.
Item Type: | Journal Article | ||||||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||
Library of Congress Subject Headings (LCSH): | Nanotechnology, Flexure | ||||||||
Journal or Publication Title: | Review of Scientific Instruments | ||||||||
Publisher: | American Institute of Physics | ||||||||
ISSN: | 0034-6748 | ||||||||
Official Date: | 1 September 2015 | ||||||||
Dates: |
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Volume: | 86 | ||||||||
Number: | 9 | ||||||||
Article Number: | 095001 | ||||||||
DOI: | 10.1063/1.4929867 | ||||||||
Status: | Peer Reviewed | ||||||||
Publication Status: | Published | ||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||
Date of first compliant deposit: | 3 February 2016 | ||||||||
Date of first compliant Open Access: | 4 February 2016 | ||||||||
Funder: | Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC) | ||||||||
Grant number: | 51175372 (NSFC), 51275337 (NSFC), 51205279 (NSFC) |
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