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This paper presents an improved control approach to be used for piezoelectric actuators. The proposed approach is based on sliding mode control with estimation perturbation (SMCPE) techniques. Also, a proportional-integral-derivative (PID)-type sliding surface is proposed for position tracking. The proposed approach has been studied and implemented in a commercial actuator. A model for the system is introduced, which includes the Bouc-Wen (BW) model to represent the hysteresis, and it is identified by means of the System Identification Toolbox in Matlab/Simulink. Experimental data show that the proposed controller has a better performance when compared to a proportional-integral (PI) controller or a conventional SMCPE in motion tracking. Furthermore, a sub-micrometer accuracy tracking can be obtained while compensating for the hysteresis effect.This research was partially funded by the Basque Government through the project ETORTEK KK-2017/00033, and by the UPV/EHU through the projects PPGA18/04 and UFI 11/07
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