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Three different investigations based on computer simulations were carried out. Simulation calculations were performed using model potentials with two- and three-body interactions which were represented by the Mie and the Axilrod-Teller potentials, respectively. In the first part, to analyze stability criteria for simple crystals, a parametrical investigation was performed and stability regions for five different crystalline structures were determined with respect to potential energy parameters. To simulate some of the basic surface processes such as diffusion and nucleation, in the second and third parts, silicon surfaces were considered as a specific example. In these studies diffusion of adatoms on stepped surfaces were simulated and energetics associated with the formation of kink sites were calculated
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