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oaioai:casi.ntrs.nasa.gov:20090043104

Microfabricated pressure and shear stress sensors

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Publication date
2009
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Abstract

A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate

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This paper was published in NASA Technical Reports Server.

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