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oaioai:collections.lib.utah.edu:ir_etd/1371119

Doctor of Philosophy

Authors
Publication date
1 January 2014
Publisher
University of Utah

Abstract

dissertationMicroelectromechanical systems (MEMS) resonators on Si have the potential to replace the discrete passive components in a power converter. The main intention of this dissertation is to present a ring-shaped aluminum nitride (AlN) piezoelectric microreson

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The University of Utah: J. Willard Marriott Digital Library

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Last time updated on 01/01/2020

This paper was published in The University of Utah: J. Willard Marriott Digital Library.

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