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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated
superior electrical performance (lower loss and higher isolation) compared to
semiconductor-based devices to implement reconfigurable microwave and millimeter
(mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch configurations
that can be easily integrated in uniplanar circuits are presented. The design
procedure and fabrication process of RF-MEMS switch topologies able to control the
propagating modes of multimodal uniplanar structures (those based on a combination
of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in
detail. Generalized electrical (multimodal) and mechanical models will be presented and
applied to the switch design and simulation. The switch-simulated results are compared
to measurements, confirming the expected performances. Using an integrated RF-MEMS
surface micromachining process, high-performance multimodal reconfigurable circuits,
such as phase switches and filters, are developed with the proposed switch configurations.
The design and optimization of these circuits are discussed and the simulated
results compared to measurements
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