Large-range Single-axis Nanopositioning System

Abstract

ME450 Capstone Design and Manufacturing Experience: Winter 2010Nanopositioning systems provide controlled motion with resolution on the nano-scale. They are critical in many applications including scanning probe microscopy, nano-manufacturing, and hard-disk drive testing. Current nanopositioning technologies can achieve a resolution of 0.02 nm, but are limited to a range of a few hundred microns. We were tasked to design and manufacture a system with a larger range than is currently available utilizing a voice-coil actuator and a flexure bearing for Professor Shorya Awtar and Mr. Gaurav Parmar. Our prototype will be used to test the control systems of our sponsors’ current two-axis nanopositioning system. Our nanopositioning system would need to meet the following engineering specifications:http://deepblue.lib.umich.edu/bitstream/2027.42/109376/1/me450w10project1_report.pdfhttp://deepblue.lib.umich.edu/bitstream/2027.42/109376/2/me450w10project1_photo.jp