Research and Analysis on Absorption Coefficient of 4H-SiC at Ultraviolet Wavelength

Abstract

基于已报道的4H-SIC材料在紫外波段(325—390nM)吸收系数的测定,结合经验公式,采用外推和多项式拟合方法分析4H-SIC材料在200—400nM紫外波段的吸收系数,并得到4H-SIC材料的吸收系数与波长的关系式。对4H-SIC吸收系数的分析研究将作为4H-SIC光电探测器结构设计的一个重要依据。Based on the previous reports on the absorption coefficients of 4H-SiC at 325—390nm,the extrapolation and polynomial fitting methods for analysis of the absorption coefficients of 4H-SiC at 200—400nm was established.And the relationship between the absorption coefficient and the wavelength was obtained.福建省自然科学基金项目资助(No.2009J05151);厦门市科技计划项目(No.350z20031076)资