Aerosol contamination of clean gases in tubes and valves

Abstract

Ultra-clean process gases containing a very low level of particulate contamination are required in many industrial applications. This is particularly true in the Integrated Circuit industry, where considerable care is taken in the installation of gas delivery systems to clean rooms. However, virtually no quantitative information is available on the release of aerosol particles from the components which comprise such systems. An experimental programme was undertaken to assess the level of particle shedding from tubes and valves. [Continues.