Testing of MEMS gyroscopes

Abstract

This diploma thesis presents theoretical information regarding MEMS gyroscopes their parameters and designs. The description of measurement chain be used for testing of MEMS gyroscopes in Honeywell International s.r.o. is presented. Special focus is devoted to: the Polytec MSA-500 system, the Standa goniometers and their controller, Peltier cell and its driver. The practical part of this thesis contains the description of the thermal control system and also the description of the developed “Measurement system” in the LabVIEW software which is used for controlling the goniometers position and the Peltier cell. The system is able to fully control two goniometer stages, align the surface of tested MEMS device to orthogonal position with respect to the Polytec MSA-500 measurement head and also control the temperature of the tested device. The last part of this thesis presents the tests of the MEMS gyroscope parameters with special focus to the MEMS gyroscope angle random walk and the bias dependence on the vacuum quality of the structure environment