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METHOD OF FORMING SELF-ASSEMBLED AND UNIFORM FULLERENE ARRAY ON SURFACE OF SUBSTRATE

Abstract

本發明提供一種於基板表面生成自組裝且高度均勻之碳簇分子陣列的方法,其包括以下之步驟:(1) 提供一基板;(2) 在真空環境下將該基板加熱至約200℃至約1000℃;及(3) 提供一碳簇分子奈米粉末,並在該真空環境下藉由物理氣相沈積法將該碳簇分子奈米粉末沈積在該基板表面上,從而於該基板表面上形成自組裝且高度均勻之碳簇分子陣列。本發明亦提供一種由此製得之碳簇分子陣列嵌入式基板,其具有優異之場發射性能,可作為場發射器用於任何場發射顯示器(Field Emission Display;FED)中。最後,本發明亦提供一種由此製得之碳簇分子陣列嵌入式基板,其可替代碳化半導體材料,作為光電元件及高溫、高功率、抗高溫或高頻率電子元件之用

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