Reduction of the Influence of Laser Beam Directional Dithering in a Laser Triangulation Displacement Probe

Abstract

Directional dithering of a laser beam potentially limits the detection accuracy of a laser triangulation displacement probe. A theoretical analysis indicates that the measurement accuracy will linearly decrease as the laser dithering angle increases. To suppress laser dithering, a scheme for reduction of the influence of laser beam directional dithering in a laser triangulation displacement probe, which consists of a collimated red laser, a laser beam pointing control setup, a receiver lens, and a charge-coupled device, is proposed in this paper. The laser beam pointing control setup is inserted into the source laser beam and the measured object and can separate the source laser beam into two symmetrical laser beams. Hence, at the angle at which the source laser beam dithers, the positional averages of the two laser spots are equal and opposite. Moreover, a virtual linear function method is used to maintain a stable average of the positions of the two spots on the imaging side. Experimental results indicate that with laser beam pointing control, the estimated standard deviation of the fitting error decreases from 0.3531 mm to 0.0100 mm , the repeatability accuracy can be lowered from ±7 mm to ±5 μ m , and the nonlinear error can be reduced from ±6 % FS (full scale) to ±0.16 % FS