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oaioai:repository.edulll.gr/edulll:10795/2984

Determination of bulk discharge current in the dielectric film of MEMS capacitive switches

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Publication date
1 January 2011
Publisher
Doi

    Abstract

    The present work presents a new method to calculate the discharge current in the bulk of dielectric films of MEMS capacitive switches. This method takes into account the real MEMS switch with non uniform trapped charge and air gap distributions. Assessment of switches with silicon nitride dielectric film shows that the discharge current transient seems to obey the stretched exponential law. The decay characteristics depend on the polarization field’s polarity, a fact comes along with experimental results obtained from thermally stimulated depolarization currents (TSDC) method used in MIM capacitors

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    Digital Repository of Hellenic Managing Authority of the Operational Programme "Education and Lifelong Learning" (EDULLL)

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    Last time updated on 09/11/2016

    This paper was published in Digital Repository of Hellenic Managing Authority of the Operational Programme "Education and Lifelong Learning" (EDULLL).

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