Control Circuitry for Self-Repairable MEMS Accelerometers

Abstract

A BISR (Built-in Self-Repairable) MEMS comb accelerometer with modularized design has been previously reported. In this paper, the differential capacitance sensing circuitry for MEMS comb accelerometer is discussed. The BISR control circuitry based on CMOS transmission gates (TGs) is proposed. Each BISR module is connected to the capacitance sensing circuitry through a transmission gate. By turning on or off a transmission gate, the corresponding module can be either connected to or isolated from the capacitance sensing circuitry. In this way, the faulty module can be easily replaced with a good redundant module for self-repair. The parasitic model for the BISR control circuitry is also analyzed. The analysis results show that the parasitic capacitance will not affect the proper operation of the BISR control circuitry. Furthermore, the signal strength will not be degraded due to the insertion of analog multiplexers. The control circuitry can effectively isolate the faulty module of the BISR MEMS comb accelerometer. Both BISR and non-BISR MEMS accelerometer designs are suggested and their performances are also extracted for comparison