Wafer bonding technologies for nano-, micro- and macro-system realization and integration

Abstract

This paper is providing an overview about most common wafer bonding technologies used for the realization of nano-, micro,- and macro systems and for system integration. At first, the general aspects of wafer bonding applications are discussed. This is followed by the technological description of different wafer bonding processes, since for different bonding applications different processes are required related to process integration and the actual surface layers on the wafers which should be bonded. Finally, benefits and drawbacks as well as technology and application aspects are shown in an overview table, providing systematization and detailed comparison of the described bonding processes. This overview should help to choose the best suitable process for wafer level bonding and other applications